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Laboratory Small PLC Controlled Three-Target Plasma Sputtering Instrument

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Laboratory Small PLC Controlled Three-Target Plasma Sputtering Instrument

  • Model Number:

    OLT-PS-16-SM
  • Compliance:

    CE Certified
  • Minimum Order Quantity:

    1
  • Voltage:

    108V-240V 50/60HZ
  • Power:

    1 year
  • Dimension(L*W*H):

    L 440mm×W 330mm × H 300mm
  • Packaging Details:

    Export wooden package
  • Delivery Time:

    6-8 day
  • Product Details

High Power Desktop Magnetron Plasma Sputtering Coater with a water cold  2"  target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film  at affordable cost. One Aluminium  target  is included for immediate use.2 .jpg

 Voltage 108/240VAC switchable
Output Power 1600VDC /250W /50mA max /Built-in over current (>150mA) protection
Specimen chamber Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height
Sputtering Head 

2“ flexible magnetron sputtering head with water cooling jacket is

included (Fig.1)

Specimen stage One 50 mm Dia stainless steel sample stage is rotatable from 0 - 5 RPM
  One manually operated shutter for target protection. (Fig.2)
 

Sputtering head holder is available for holding sputtering head while non-operation. The distance between the sputtering head and sample stage 

is adjustable from 60 - 100 mm.

  Max Coating area: 4" diameter max. 
 

One Air Cold Recirculating Water Chiller 10 L/min Flow is included for 

cooling sputtering head. (Fig.6)

Control Panel

 6" color  touch-screen control panel with PLC integration for easy 

operation One panel for all parameters monitor and 

control: vacuum, current.

Ultimate 

Vacuum Pressure

1.Built-in KF25 vacuum port
2.The system requires an Ar gas tank with pressure regulator. (not included)

3.< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, 

Mo targets (not sensitive to air)

4.< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn 

targets (sensitive to air)

5.The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking
Gas Atmosphere One needle valve installed to allow Ar gas inlet to achieve better plasma coating.
The system requires an Ar gas tank with pressure regulator (not included)
Target Target size: 50 mm dia. x (0.1 - 3) mm,thickness
One 2"  Aluminium target  is included

Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc.  These targets are 

available upon request.

Aluminum Target Recommend Coating Method

Optional Film 

Thickness Monitor

 Target size: 50 mm dia. x (0.1 - 3) mm,thickness
One 2"  Aluminium target  is included

Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc.  These targets are 

available upon request.

Aluminum Target Recommend Coating Method
Overall Dimensions  L 440mm×W 330mm × H 300mm without sputtering head
Warranty & Certificate One year limited with lifetime support  CE certified

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Packing and Shipping

-The main parts will be wrapped with foam,then put into the carton; the mainbody portion will be packed in wooden cases;
-Both neutral and customized packaging can be available.

-We can ship the goods to you by International Express such as DHL,UPS,TNT,EMS and so on, you can also choose the appropriate one based on your timeline and budget. Besides,you can choose to use your own shipping agent

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