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Small Scale Laboratory Compact Desktop Plasma Sputter Coater Or Metal Evaporating Coater PVD Coater

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Small Scale Laboratory Compact Desktop Plasma Sputter Coater Or Metal Evaporating Coater PVD Coater

  • Model Number:

    OLT-1100X-DSC-15E
  • Compliance:

    CE Certified
  • Minimum Order Quantity:

    1
  • Capacity:

    < 2000W (including pump)
  • Voltage:

    108V-240V 50/60HZ
  • Power:

    1 year
  • Dimension(L*W*H):

    L360mm x W300mm x H380mm
  • Weight:

    50kg
  • Packaging Details:

    Export wooden package
  • Delivery Time:

    6-8 day
  • Product Details

 OLT-1100X-DSC-15E is a Evaporating coating system featuring single target sources:

OLT-1100X-DSC-15E is a compact evaporating coater, which is suitable for coating light metal, Al. Mg, and Li as well as carbon film to sample upto 2" wafer

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Input voltage AC 108V-220V
Input Power < 2000W (including pump)
Output Power 1600VDC
50mA max.
Specimen chamber Fused glass tube, 160 mm Dia. x 120mm Height
Specimen stage One 50 mm Dia.sample stage
Max. coating area: 45 mm 
Accessories included 156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust 
Filter, Bellows & KF-D25 Inlet -EQ-FYP
Stainless steel bellows with KFD-25 adapter and clamps
10L/min recirculating water chiller is included  to cool 
magnetron head.  
Gas Atmosphere One needle valve installed to allow Ar gas inlet to achieve better 
plasma coating
Target One Au target: 50 mm dia. x 0.12 mm, 1pcs is included
Optional targets:
Pt target (50mm dia.x0.12mm, 4N) available
Ag target (50 mm dia. x 0.5mm, 4N) available
Overall Dimensions L360mm x W300mm x H380mm
Net Weight 50 kg
Warranty & Certificate One year limited with lifetime support
CE certified
Knowledge of Sputter Coating For the best film strength, please use plasma cleaner to clean 
sample surface before coating
For coating Al. Zinc and graphite light weight metallic material,   
the sputtering coating is not efficient due to low energy,   
please consider to use thermal evaporating coater
The system requires an Ar gas tank with pressure regulator 
which is not included

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1. Equipped with Rotary Vane vacuum pump, the system vacuum degree can match 10-2 Torr

2. Equipped with KF 25 Bellows and clamp, can connect with vacuum pump

3. Multi-function, can coat various metal and Carbon

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