Environmental Protection Clean Etching Plasma Machine

(1.1)The role of plasma cleaning

The principle of plasma cleaning is mainly:

(A)Etching on the surface of materials - physical effects

A large number of active particles in the plasma, such as a large number of ions, excited molecules, and free radicals, act on the

surface of the solid sample, which not only removes the original contaminants and impurities, but also produces an etching effect

to roughen the surface of the sample. Many fine pits are formed, increasing the surface ratio of the sample. Improve the wetting

properties of solid surfaces.

(B)Activation bond energy, cross-linking

The energy of the particles in the plasma is between 0-20 eV, and most of the bonds in the polymer are between 0-10 eV.

When a solid surface is used, the original chemical bond on the solid surface can be broken, and the free radicals in the plasma

and these bonds

The formation of a network of crosslinked structures greatly activates surface activity.

(C)Forming new functional groups - chemistry

If a reactive gas is introduced into the discharge gas, a complicated chemical reaction occurs on the surface of the activated

material, and new functional groups such as a hydrocarbon group, an amino group, a carboxyl group, and the like are introduced,

and these functional groups are all active groups, which can significantly improve the surface activity of the material.