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Physical Deposition System Plasma Cleaner For Wafers

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Physical Deposition System Plasma Cleaner For Wafers

  • Model Number:

    OLT-PS-10L
  • Compliance:

    CE Certified
  • Minimum Order Quantity:

    1
  • Capacity:

    10L
  • Voltage:

    108V-240V 50/60HZ
  • Warranty:

    3 year
  • Packaging Details:

    Export wooden package
  • Delivery Time:

    8-10 day
  • Product Details

   Physical Deposition System Plasma Cleaner For Wafers

Model no.

OLT-PS-10L

OLT-PS-P5L

OLT-PS-2LA

OLT-PS-2L-B

Display

LCD touch screen

LED button screen

Power supply

AC 108V-240V  50Hz

Working current

plasma cleaner working current less than 1.2A

Radio frequency power

100-400w, adjustable

< 200w, adjustable, or customized

RF frequency

13.56MHz(offset less than 0.4KHz)

40KHz(offset less than 0.2KHz)

Characteristic impedance

50 Ohm,automatch

Chamber capacity

10L

5L

2L

2L

Vacuum degree

60Pa-100Pa

10Pa-100Pa

30Pa-100Pa

10Pa-1000Pa

Cleaning time

1~6000ml adjustable

Gas flow speed

10~100ml

Control mode

Manual control or Programmable control

Vacuum pump

CY-4C

Vacuum chamber temper.

less than 65℃

Cooling type

forced air cooling

Equipment list

plasma cleaner:1set; vacuum pump: 1set; vacuum high-pressure hose: 1pc;O type card: 4pcs;pr

CE Certificated Laboratoty mini Plasma Cleaner for Si, glass, metal pieces

CE Certificated Laboratoty mini Plasma Cleaner for Si, glass, metal piecesCE Certificated Laboratoty mini Plasma Cleaner for Si, glass, metal piecesCE Certificated Laboratoty mini Plasma Cleaner for Si, glass, metal pieces

Company Information

CE Certificated Laboratoty mini Plasma Cleaner for Si, glass, metal pieces



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